Statistics
Publications
1
Citations
20
H-Index
1
Active since
1992
Affiliations
Hiroshima University(Current)
Shigeo Uenaga is an author at Hiroshima University specializing in surface science, silicon doping, and materials science.
Publications per year
1992–1992
1
1
Cleaning and Oxidation of Heavily Doped Si Surfaces
T. Yasaka, Shigeo Uenaga, H. Yasutake et al. · MRS Proceedings · 1992 · 20 citations
Natural Sciences, Materials Engineering, Materials Science +12
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