Statistics
Publications
1
Citations
25
H-Index
1
Active since
2023
Affiliations
ASML (Netherlands)(Current)
T.J. Coenen is an author at ASML (Netherlands) specializing in engineering, metrology, and device characterization.
Publications per year
2023–2023
1
1
Soft x-ray: novel metrology for 3D profilometry and device pitch overlay
Christina L. Porter, T.J. Coenen, Niels Geypen et al. · 2023 · 25 citations
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