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Masaya Kawamata

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1

Publications

14

Citations

1

H-Index

2011

Active since

Affiliations

Tokyo Electron (Japan)(Current)

Masaya Kawamata is an author at Tokyo Electron (Japan) specializing in surface science, engineering, and materials engineering.

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Publications per year

2011–2011

1

Publications

1

Bottom up deposition of advanced iPVD Cu process integrated with iPVD Ti and CVD Ru

Tadahiro Ishizaka, Takashi Sakuma, Masaya Kawamata et al. · Microelectronic Engineering · 2011 · 14 citations

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