Concepedia

Claus-Dieter Schmidt

CS

1

Publications

26

Citations

1

H-Index

2002

Active since

Affiliations

Fraunhofer Institute for Machine Tools and Forming Technology(Current)

Claus-Dieter Schmidt is an author at Fraunhofer Institute for Machine Tools and Forming Technology specializing in microfabrication, instrumentation, and microelectronics.

Top concepts

EngineeringInstrumentationMicroelectronicsMicrofabricationElectronic PackagingElectrical Engineering

Publications per year

2002–2002

1

Publications

1

ESPI solution for non-contacting MEMS-on-wafer testing

Petra Aswendt, Claus-Dieter Schmidt, Dirk Zielke et al. · Optics and Lasers in Engineering · 2002 · 26 citations

Espi Solution, Electrical Engineering, Wafer Scale Processing +7

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