Leonid Yu. Beliaev

Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor deposition

Leonid Yu. Beliaev, Evgeniy Shkondin, Andrei V. Lavrinenko et al. · Thin Solid Films · 2022 · 93 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Optical properties of plasmonic titanium nitride thin films from ultraviolet to mid-infrared wavelengths deposited by pulsed-DC sputtering, thermal and plasma-enhanced atomic layer deposition

Leonid Yu. Beliaev, Evgeniy Shkondin, Andrei V. Lavrinenko et al. · Optical Materials · 2023 · 37 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Thickness-dependent optical properties of aluminum nitride films for mid-infrared wavelengths

Leonid Yu. Beliaev, Evgeniy Shkondin, Andrei V. Lavrinenko et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2021 · 36 citations · Full text

Natural Sciences, Materials Science, Physics +17

Guided‐mode resonance on pedestal and half‐buried high‐contrast gratings for biosensing applications

Giovanni Finco, Mehri Ziaee Bideskan, Larissa Vertchenko et al. · Nanophotonics · 2021 · 31 citations · Full text

Engineering, Bioengineering, Biomedical Engineering +17

Optical Biosensors Based on Nanostructured Silicon High-Contrast Gratings for Myoglobin Detection

Leonid Yu. Beliaev, Sungyeong Kim, Bjørn Funch Schrøder Nielsen et al. · ACS Applied Nano Materials · 2023 · 21 citations

Engineering, Bioengineering, Biomedical Engineering +17