3
Publications
68
Citations
3
H-Index
2001
Active since
Affiliations
H. Lewalter is an author at Goethe University Frankfurt specializing in materials science, engineering, and materials engineering.
Top concepts
Material ScienceEngineeringMaterials EngineeringChemistryThin FilmsApplied PhysicsChemical Engineering
Publications per year
2001–2003
3
3
Formation of tantalum nitride films by rapid thermal processing
C Angelkort, A. Berendes, H. Lewalter et al. · Thin Solid Films · 2003 · 26 citations
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