Erika C. Vote

Micromachined infrared sensors using tunneling displacement transducers

Thomas W. Kenny, J. K. Reynolds, J. A. Podosek et al. · Review of Scientific Instruments · 1996 · 61 citations

Engineering, Materials Science, Mechanical Engineering +17

Wide-bandwidth electromechanical actuators for tunneling displacement transducers

Thomas W. Kenny, William J. Kaiser, Howard K. Rockstad et al. · Journal of Microelectromechanical Systems · 1994 · 50 citations

Engineering, Electrical Engineering, Mechanical Engineering +11

A micromachined magnetic-field sensor based on an electron tunneling displacement transducer

D. P. DiLella, L. J. Whitman, Richard J. Colton et al. · Sensors and Actuators A Physical · 2000 · 42 citations

Engineering, Electrical Engineering, Electromagnetism +13

<title>Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications</title>

Linda M. Miller, Michael L. Agronin, Randall K. Bartman et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 33 citations

Engineering, Materials Engineering, Materials Science +17

Micromachined tunneling displacement transducers for physical sensors

Thomas W. Kenny, William J. Kaiser, J. A. Podosek et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 22 citations

Engineering, Electrical Engineering, Mechanical Engineering +17