Concepedia
Statistics
Publications
4
Citations
93
H-Index
Active since
1998
Affiliations
University of Tennessee at Knoxville(Current)
National Transportation Research Center
Oak Ridge National Laboratory
Korea Research Institute of Standards and Science
Yeong‐Uk Ko is an author at University of Tennessee at Knoxville specializing in engineering, device modeling, and device simulation.
Publications per year
1998–2001
<title>Metrics of resolution and performance for CD-SEMs</title>
David C. Joy, Yeong‐Uk Ko, Justin J. Hwu · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 50 citations
Engineering, Biomedical Engineering, Biomedical Imaging +15
Monte Carlo simulation of charging effects on linewidth metrology
Yeong‐Uk Ko, Myung‐Sae Chung, Seung‐Woo Kim · Scanning · 1998 · 21 citations
Engineering, Materials Engineering, Materials Science +15
Monte carlo simulation of charging effects in linewidth metrology (II): On insulator substrate
Yeong‐Uk Ko, Myung‐Sae Chung · Scanning · 1998 · 12 citations · Full text
Engineering, Materials Engineering, Materials Science +12
Monte Carlo model of charging in resists in e-beam lithography
Yeong‐Uk Ko, David C. Joy · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 10 citations · Full text
Engineering, Electrical Engineering, Manufacturing Engineering +13
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