Concepedia

Yasutomo Kusunoki

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1

Publications

11

Citations

1

H-Index

1989

Active since

Affiliations

Hiroshima University(Current)

Yasutomo Kusunoki is an author at Hiroshima University specializing in engineering, surface science, and microfabrication.

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Publications per year

1989–1989

1

Publications

1

Downstream Etching of Si and SiO<sub>2</sub> Employing CF<sub>4</sub>/O<sub>2</sub> or NF<sub>3</sub>/O<sub>2</sub> at High Temperature

Akiyoshi Nagata, Hideki Ichihashi, Yasutomo Kusunoki et al. · Japanese Journal of Applied Physics · 1989 · 11 citations

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