Wei-Yuan Chang

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Active since

2022

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

Wei-Yuan Chang is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in semiconductor surfaces, interface quality assurance, and microelectronics.

Publications per year

2022–2023

Publications

Stacked SiGe nanosheets p-FET for Sub-3 nm logic applications

Chun-Lin Chu, Shu‐Han Hsu, Wei-Yuan Chang et al. · Scientific Reports · 2023 · 17 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

SiGe and Si Gate-All-Around FET Fabricated by Selective Etching the Same Epitaxial Layers

Wei-Yuan Chang, Guang-Li Luo, Yi-Shuo Huang et al. · 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) · 2022 · 10 citations

Engineering, Electrical Engineering, Materials Science +15

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