Concepedia

T. Hachiya

TH

2

Publications

21

Citations

2

H-Index

2005

Active since

Affiliations

Toshiba (Japan)(Current)

T. Hachiya is an author at Toshiba (Japan) specializing in microelectronics, applied physics, and materials engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMaterials EngineeringElectrical EngineeringThin FilmsNanoelectronicsSurface ScienceElectrochemistry

Publications per year

2005–2007

2

Publications

2

Challenge of low-k materials for 130, 90, 65 nm node interconnect technology and beyond

Hiromi Miyajima, Kazuki Watanabe, Koji Fujita et al. · 2005 · 11 citations

Engineering, Optimum Beol Structures, Interconnect (Integrated Circuits) +17

Impact of Residual Impurities on Annealing Properties of Vacancies in Electroplated Cu Studied Using Monoenergetic Positron Beams

Akira Uedono, Kazuteru Mori, Kenichi Ito et al. · Japanese Journal of Applied Physics · 2007 · 10 citations

Cu Films, Engineering, Residual Impurities +17

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