Daniel Maurer

Integrated Process Modeling—A Process Validation Life Cycle Companion

Thomas Zahel, Stefan Hauer, Eric Mueller et al. · Bioengineering · 2017 · 35 citations · Full text

Engineering, Manufacturing Engineering, Quality Management +17

Inductively-coupled plasma-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbide thin films for MEMS

Tobias Frischmuth, Michael Schneider, Daniel Maurer et al. · Sensors and Actuators A Physical · 2016 · 34 citations

Engineering, Materials Engineering, Materials Science +14

High temperature annealing effects on the chemical and mechanical properties of inductively-coupled plasma-enhanced chemical vapor deposited a-SiC:H thin films

Tobias Frischmuth, Michael Schneider, Daniel Maurer et al. · Thin Solid Films · 2016 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low temperature deposition of a-SiC:H thin films applying a dual plasma source process

Tobias Frischmuth, Michael Schneider, Iva Bogdanović Radović et al. · Thin Solid Films · 2016 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +14

Workflow for Criticality Assessment Applied in Biopharmaceutical Process Validation Stage 1

Thomas Zahel, Lukas Marschall, Sandra Abad et al. · Bioengineering · 2017 · 10 citations · Full text

Pharmacy, Pharmaceutical Analysis, Process Safety +12