Concepedia

Hae‐Jeong Lee

HL

26

Publications

897

Citations

19

H-Index

2001

Active since

Affiliations

National Institute of Standards and Technology(Current)

University of Maryland, College Park

Physical Sciences (United States)

Seoul National University

University of Michigan

Hae‐Jeong Lee is an author at National Institute of Standards and Technology specializing in engineering, materials science, and applied physics.

Top concepts

Publications per year

2001–2023

26

Publications

26

Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers

Yang Shu, Peter A. Mirau, Chien-Shing Pai et al. · Chemistry of Materials · 2002 · 131 citations

, , +19

Molecular Templating of Nanoporous Ultralow Dielectric Constant (≈1.5) Organosilicates by Tailoring the Microphase Separation of Triblock Copolymers

Yang Shu, Peter A. Mirau, Chien-Shing Pai et al. · Chemistry of Materials · 2001 · 96 citations

, , +19

Structural Comparison of Hydrogen Silsesquioxane Based Porous Low-<i>k</i> Thin Films Prepared with Varying Process Conditions

Hae‐Jeong Lee, Eric K. Lin, Howard Wang et al. · Chemistry of Materials · 2002 · 76 citations

, , +16

Structural characterization of porous low-<i>k</i> thin films prepared by different techniques using x-ray porosimetry

Hae‐Jeong Lee, Christopher L. Soles, Dawei Liu et al. · Journal of Applied Physics · 2004 · 56 citations

, , +15

Effect of initial resist thickness on residual layer thickness of nanoimprinted structures

Hae‐Jeong Lee, Hyun Wook Ro, Christopher L. Soles et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 47 citations

, , +26

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