Concepedia

R. C. Manz

RC

4

Publications

185

Citations

4

H-Index

1962

Active since

Affiliations

AT&T (United States)(Current)

R. C. Manz is an author at AT&T (United States) specializing in applied physics, thin films, and engineering.

Top concepts

Publications per year

1962–1985

4

Publications

4

Impurity Distribution in Epitaxial Silicon Films

Candice Thomas, D. Kahng, R. C. Manz · Journal of The Electrochemical Society · 1962 · 134 citations · Full text

, , +14

Anomalous Impurity Diffusion in Epitaxial Silicon near the Substrate

D. Kahng, Candice Thomas, R. C. Manz · Journal of The Electrochemical Society · 1962 · 22 citations

, , +2

A Multiresponse Factorial Study of Reactor Parameters in Plasma‐Enhanced CVD Growth of Amorphous Silicon Nitride

Paul W. Bohn, R. C. Manz · Journal of The Electrochemical Society · 1985 · 18 citations

, , +19

Epitaxial Silicon Junctions

D. Kahng, Candice Thomas, R. C. Manz · Journal of The Electrochemical Society · 1963 · 11 citations

, , +13

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