Concepedia

Eddie Lee

EL

2

Publications

242

Citations

2

H-Index

2004

Active since

Affiliations

Genus (United States)(Current)

Eddie Lee is an author at Genus (United States) specializing in thin films, applied physics, and materials science.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceChemistryNanomanufacturingOptical MaterialsSurface TechnologyMaterials Engineering

Publications per year

2004–2005

2

Publications

2

ALD of Hafnium Oxide Thin Films from Tetrakis(ethylmethylamino)hafnium and Ozone

Xinye Liu, Sasangan Ramanathan, Ana Longdergan et al. · Journal of The Electrochemical Society · 2005 · 200 citations

Aluminium Nitride, Optical Materials, Engineering +16

Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia

Xinye Liu, Sasangan Ramanathan, Eddie Lee et al. · MRS Proceedings · 2004 · 42 citations

Materials Science, Engineering, Surface Science +7

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