Concepedia

D. Magni

DM

5

Publications

485

Citations

5

H-Index

1997

Active since

Affiliations

École Polytechnique Fédérale de Lausanne(Current)

Tetra Laval (Switzerland)

D. Magni is an author at École Polytechnique Fédérale de Lausanne specializing in engineering, applied physics, and physics.

Top concepts

Publications per year

1997–2000

5

Publications

5

Investigations of CH<sub>4</sub>, C<sub>2</sub>H<sub>2</sub>and C<sub>2</sub>H<sub>4</sub>dusty RF plasmas by means of FTIR absorption spectroscopy and mass spectrometry

Ch. Deschenaux, A. Affolter, D. Magni et al. · Journal of Physics D Applied Physics · 1999 · 209 citations · Full text

A voltage uniformity study in large-area reactors for RF plasma deposition

L. Sansonnens, A. Pletzer, D. Magni et al. · Plasma Sources Science and Technology · 1997 · 103 citations · Full text

, , +13

Oxygen diluted hexamethyldisiloxane plasmas investigated by means of<i>in situ</i>infrared absorption spectroscopy and mass spectrometry

D. Magni, Ch. Deschenaux, Ch. Hollenstein et al. · Journal of Physics D Applied Physics · 2000 · 103 citations · Full text

Silicon oxide particle formation in RF plasmas investigated by infrared absorption spectroscopy and mass spectrometry

Ch. Hollenstein, A.A. Howling, C. Courteille et al. · Journal of Physics D Applied Physics · 1998 · 50 citations · Full text

Dust Particle Diagnostics in Rf Plasma Deposition of Silicon and Silicon Oxide Films (Invited)

Ch. Hollenstein, A.A. Howling, C. Courteille et al. · MRS Proceedings · 1998 · 20 citations · Full text

, , +9

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