Concepedia

K Takahashi

KT

1

Publications

32

Citations

1

H-Index

2002

Active since

Affiliations

Toyobo (Japan)(Current)

K Takahashi is an author at Toyobo (Japan) specializing in materials engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsNanoelectronicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationSurface EngineeringMaterials EngineeringElectrical Engineering

Publications per year

2002–2002

1

Publications

1

Plasma etching of SiC surface using NF3

Akimasa Tasaka, K Takahashi, Keiko Tanaka et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 32 citations

Materials Engineering, Materials Science, Electrical Engineering +15

Rows per page

1–1 of 1