Concepedia

Shigeru Mishimatsu

SM

1

Publications

37

Citations

1

H-Index

1984

Active since

Affiliations

Hitachi (Japan)(Current)

Shigeru Mishimatsu is an author at Hitachi (Japan) specializing in engineering, applied physics, and microfabrication.

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Publications per year

1984–1984

1

Publications

1

Microwave plasma etching

Keizô Suzuki, Ken Ninomiya, Shigeru Mishimatsu · Vacuum · 1984 · 37 citations

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