Markus Thier

Integrated system and control design of a one DoF nano-metrology platform

Rudolf Saathof, Markus Thier, Reinhard Hainisch et al. · Mechatronics · 2017 · 28 citations

Engineering, Nanoengineering, Microfabrication +10

Low-Latency Shack–Hartmann Wavefront Sensor Based on an Industrial Smart Camera

Markus Thier, R. París, Thomas Thurner et al. · IEEE Transactions on Instrumentation and Measurement · 2012 · 24 citations

Adaptive Optic, Wavefront Sensing, Light Field Imaging +12

Six Degree of Freedom Vibration Isolation Platform for In-Line Nano-Metrology

Markus Thier, Rudolf Saathof, Andreas Sinn et al. · IFAC-PapersOnLine · 2016 · 22 citations · Full text

Engineering, Mechanical Engineering, Sensor Technology +19

Supplemental Peak Filters for Advanced Disturbance Rejection on a High Precision Endeffector for Robot-Based Inline Metrology

Ernst Csencsics, Markus Thier, Shingo Ito et al. · IEEE/ASME Transactions on Mechatronics · 2021 · 19 citations

Engineering, Measurement, Field Robotics +23

System and Control Design of a Voice Coil Actuated Mechanically Decoupling Two-Body Vibration Isolation System

Ernst Csencsics, Markus Thier, Reinhard Hainisch et al. · IEEE/ASME Transactions on Mechatronics · 2017 · 18 citations

Engineering, Mechanical Engineering, Control Systems +18