Concepedia

Eric J. Tonnis

EJ

Statistics

Publications

2

Citations

97

H-Index

2

Active since

2000

Affiliations

University of California, Berkeley(Current)

Eric J. Tonnis is an author at University of California, Berkeley specializing in plasma fundamentals, plasma physics, and plasma sources.

Publications per year

2000–2002

2

Publications

2

Neutral gas temperatures measured within a high-density, inductively coupled plasma abatement device

Eric J. Tonnis, David B. Graves · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 70 citations

, , +11

Inductively coupled, point-of-use plasma abatement of perfluorinated compounds and hydrofluorinated compounds from etch processes utilizing O2 and H2O as additive gases

Eric J. Tonnis, David B. Graves, Victor Vartanian et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 27 citations

, , +16

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