Concepedia

Tsuyoshi Noyori

TN

Statistics

Publications

1

Citations

23

H-Index

1

Active since

2004

Affiliations

Meidensha (Japan)(Current)

Tsuyoshi Noyori is an author at Meidensha (Japan) specializing in engineering, microelectronics, and environmental engineering.

Top concepts

OzoneEngineeringMicroelectronicsChemical EngineeringEnvironmental Engineering

Publications per year

2004–2004

1

Publications

1

Development of a continuous generation/supply system of highly concentrated ozone gas for low-temperature oxidation process

Shingo Ichimura, Hidehiko Nonaka, Yoshiki Morikawa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 23 citations

Advanced Oxidation Process, Chemical Engineering, Hc Ozone Gas +11

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