Concepedia
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Publications
1
Citations
19
H-Index
Active since
2001
Affiliations
National Yang Ming Chiao Tung University(Current)
Shaw-Ru Ku is an author at National Yang Ming Chiao Tung University specializing in applied physics, engineering, and semiconductors.
Top concepts
Thin FilmsEngineeringSemiconductorsApplied PhysicsSurface ScienceMaterial ScienceCrystalline DefectsCondensed Matter Physics
Publications per year
2001–2001
Reactively Sputtered Amorphous TaSi<sub>x</sub>N<sub>y</sub> Films Serving as Barrier Layer Against Copper Diffusion
Cheng-Li Lin, Shaw-Ru Ku, Mao-Chieh Chen · Japanese Journal of Applied Physics · 2001 · 19 citations
Materials Science, Semiconductors, Epitaxial Growth +14
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