Eiji Kamijo

Preparation of amorphous CNx thin films by pulsed laser deposition using a radio frequency radical beam source

Yoshifumi Aoi, Kojiro Ono, Eiji Kamijo · Journal of Applied Physics · 1999 · 71 citations

Optical Materials, Engineering, Laser Applications +16

Crystallization of carbon films by ion beam assist technology

K. Ogata, Yasunori Andoh, Eiji Kamijo · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 57 citations

Materials Engineering, Carbon Films, Materials Science +5

Properties of boron nitride coating films prepared by the ion beam and vapor deposition method (IVD)

Yasunori Andoh, K. Ogata, Yasuo Suzuki et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 50 citations

Materials Science, Boron Nitride, Engineering +8

Composition and crystal structure of carbon nitride films prepared by the electron cyclotron resonance plasma sputtering method

Youji Tani, Yoshifumi Aoi, Eiji Kamijo · Applied Physics Letters · 1998 · 35 citations

Materials Science, Crystal Structure, Carbon Target +15

Properties of aluminum nitride films by an ion beam and vapor deposition method

K. Ogata, Yasunori Andoh, Eiji Kamijo · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 34 citations

Materials Engineering, Materials Science, Aluminium Nitride +9