Robert-H. Munnig Schmidt

Statistics

Publications

Citations

141

H-Index

Active since

2012

Affiliations

Delft University of Technology(Current)

Robert-H. Munnig Schmidt is an author at Delft University of Technology specializing in engineering, integrated circuit design, and temperature compensation.

Publications per year

2012–2015

Publications

Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry

Robert-H. Munnig Schmidt · Philosophical Transactions of the Royal Society A Mathematical Physical and Engineering Sciences · 2012 · 121 citations

Engineering, Electrical Engineering, Manufacturing Engineering +8

Thermal displacement error compensation in temperature domain

Takeshi Morishima, Ron A.J. van Ostayen, Jan van Eijk et al. · Precision Engineering · 2015 · 20 citations

Engineering, Mechanical Engineering, Heat Transfer +13

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