Concepedia
1
Publications
38
Citations
H-Index
2012
Active since
Affiliations
Yamagata University(Current)
M. Degai is an author at Yamagata University specializing in engineering, applied physics, and chemical engineering.
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ChemistryEngineeringApplied PhysicsSurface ScienceChemical Engineering
Publications per year
2012–2012
Non-heating atomic layer deposition of SiO2 using tris(dimethylamino)silane and plasma-excited water vapor
M. Degai, Kensaku Kanomata, Shigeru Kubota et al. · Thin Solid Films · 2012 · 38 citations
Plasma-excited Water Vapor, Chemical Engineering, Engineering +7
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