Concepedia

Fariborz Maseeh

FM

9

Publications

321

Citations

9

H-Index

1990

Active since

Affiliations

Massachusetts Institute of Technology(Current)

Fariborz Maseeh is an author at Massachusetts Institute of Technology specializing in engineering, mechanical engineering, and materials science.

Top concepts

EngineeringMechanical EngineeringMaterial ScienceSolid MechanicsMicrofabricationMechanics Of MaterialsMechanicsMaterial MechanicsMechanics ModelingMechanical Behavior

Publications per year

1990–2003

9

Publications

9

Verification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films

Jeffrey Y. Pan, Pinyen Lin, Fariborz Maseeh et al. · 1990 · 115 citations

Engineering, Multiscale Mechanics, Mechanical Engineering +19

Plastic deformation of higly doped Silicon

Fariborz Maseeh, S.D. Senturia · Sensors and Actuators A Physical · 1990 · 37 citations

Materials Science, Materials Engineering, Engineering +8

<title>Integrated optical gyroscopes offering low cost, small size and vibration immunity</title>

Christos Monovoukas, Andrew Swiecki, Fariborz Maseeh · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 35 citations

Waveguides, Engineering, Integrated Optical Gyroscopes +19

Calibrated measurements of elastic limit, modulus, and the residual stress of thin films using micromachined suspended structures

Fariborz Maseeh, Martin A. Schmidt, Mark G. Allen et al. · 2003 · 33 citations

Membrane Structure, Engineering, Micromechanics +20

A CAD architecture for microelectromechanical systems

Fariborz Maseeh, R.M. Harris, S.D. Senturia · 2002 · 31 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +19

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