Concepedia

G. M. Burdick

GM

5

Publications

346

Citations

5

H-Index

1998

Active since

Affiliations

Arizona State University(Current)

G. M. Burdick is an author at Arizona State University specializing in engineering, environmental engineering, and chemical engineering.

Top concepts

EngineeringFluid DynamicsApplied PhysicsSurface ScienceMaterial ScienceMicrofabricationNanomanufacturingChemical EngineeringEnvironmental EngineeringBusiness

Publications per year

1998–2005

5

Publications

5

Hydrodynamic particle removal from surfaces

G. M. Burdick, N. S. Berman, Stephen P. Beaudoin · Thin Solid Films · 2005 · 128 citations

Engineering, Fluid Mechanics, Hydrodynamics +5

Describing Hydrodynamic Particle Removal from Surfaces Using the Particle Reynolds Number

G. M. Burdick, N. S. Berman, Steve Beaudoin · Journal of Nanoparticle Research · 2001 · 106 citations

Assessment of post-CMP cleaning mechanisms using statistically-designed experiments

G. Zhang, G. M. Burdick, Feng-xian DAI et al. · Thin Solid Films · 1998 · 53 citations

Engineering, Decontamination, Environmental Engineering +9

A Theoretical Evaluation of Hydrodynamic and Brush Contact Effects on Particle Removal during Brush Scrubbing

G. M. Burdick, N. S. Berman, Stephen P. Beaudoin · Journal of The Electrochemical Society · 2003 · 31 citations

Brush Contact Effects, Engineering, Fluid Mechanics +19

A Theoretical Analysis of Brush Scrubbing Following Chemical Mechanical Polishing

G. M. Burdick, N. S. Berman, Stephen P. Beaudoin · Journal of The Electrochemical Society · 2003 · 28 citations · Full text

Engineering, Adhering Particles, Nanotribology +19

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