Yiyu Sun

Multi-objective lithographic source mask optimization to reduce the uneven impact of polarization aberration at full exposure field

Tie Li, Yiyu Sun, Enze Li et al. · Optics Express · 2019 · 19 citations · Full text

Engineering, Biomedical Engineering, Biomedical Imaging +14

Fast nonlinear compressive sensing lithographic source and mask optimization method using Newton-IHTs algorithm

Yiyu Sun, Naiyuan Sheng, Tie Li et al. · Optics Express · 2019 · 18 citations · Full text

Engineering, Computational Engineering, Biomedical Imaging +15

Fast lithographic source optimization method of certain contour sampling-Bayesian compressive sensing for high fidelity patterning

Yiyu Sun, Yanqiu Li, Tie Li et al. · Optics Express · 2019 · 14 citations · Full text

Arts, Computer Engineering, Digital Fabrication +12

Multiple-field-point pupil wavefront optimization in computational lithography

Tie Li, Yang Liu, Yiyu Sun et al. · Applied Optics · 2019 · 10 citations

Medicine, Computational Engineering, Biomedical Optics +11

Sampling-based imaging model for fast source and mask optimization in immersion lithography

Yiyu Sun, Yanqiu Li, Guanghui Liao et al. · Applied Optics · 2021 · 10 citations

Engineering, Computational Engineering, Biomedical Imaging +15