Concepedia

Mami Miyasaka

MM

Statistics

Publications

1

Citations

16

H-Index

1

Active since

2007

Affiliations

ASML (Netherlands)(Current)

Mami Miyasaka is an author at ASML (Netherlands) specializing in overlay accuracy, microfabrication, and engineering.

Publications per year

2007–2007

1

Publications

1

The application of SMASH alignment system for 65-55-nm logic devices

Mami Miyasaka, Hideki Saito, Takao Tamura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 16 citations

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