Concepedia
1
Publications
15
Citations
H-Index
2023
Active since
Affiliations
University of California San Diego(Current)
Cheng-Hsuan Kuo is an author at University of California San Diego.
Publications per year
2023–2023
Low-Resistivity Titanium Nitride Thin Films Fabricated by Atomic Layer Deposition with TiCl<sub>4</sub> and Metal–Organic Precursors in Horizontal Vias
Cheng-Hsuan Kuo, Aaron J. McLeod, Ping‐Che Lee et al. · ACS Applied Electronic Materials · 2023 · 15 citations · Full text
Rows per page
1–1 of 1