Concepedia

Y. Soda

YS

Statistics

Publications

4

Citations

262

H-Index

4

Active since

2005

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Y. Soda is an author at National Institute of Advanced Industrial Science and Technology specializing in plasma physics, microwave plasma sources, and microwave plasmas.

Publications per year

2005–2006

4

Publications

4

Synthesizing single-crystal diamond by repetition of high rate homoepitaxial growth by microwave plasma CVD

Yoshiaki Mokuno, Akiyoshi Chayahara, Y. Soda et al. · Diamond and Related Materials · 2005 · 128 citations

, , +14

High rate homoepitaxial growth of diamond by microwave plasma CVD with nitrogen addition

Yoshiaki Mokuno, Akiyoshi Chayahara, Y. Soda et al. · Diamond and Related Materials · 2006 · 70 citations

, , +13

Modeling and numerical analyses of microwave plasmas for optimizations of a reactor design and its operating conditions

Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno et al. · Diamond and Related Materials · 2005 · 37 citations

, , +17

Numerical analysis of power absorption and gas pressure dependence of microwave plasma using a tractable plasma description

Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno et al. · Diamond and Related Materials · 2005 · 27 citations

, , +9

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