Concepedia

Seiichi Nishida

SN

Statistics

Publications

2

Citations

33

H-Index

2

Active since

1997

Affiliations

Mitsubishi Heavy Industries (Japan)(Current)

Seiichi Nishida is an author at Mitsubishi Heavy Industries (Japan) specializing in engineering, plasma theory, and plasma simulation.

Top concepts

Publications per year

1997–1997

2

Publications

2

Magnetically enhanced inductively coupled plasma CVD for a-Si:H fabrication

M. Murata, Yoshinori Takeuchi, Seiichi Nishida · Vacuum · 1997 · 18 citations

, , +3

Production of Inductively Coupled RF Plasma Using a Ladder-Shaped Antenna

Masayoshi Murata, Hiroshi Mashima, Masao Yoshioka et al. · Japanese Journal of Applied Physics · 1997 · 15 citations

, , +15

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