Concepedia
Statistics
Publications
1
Citations
14
H-Index
Active since
2009
Toru Umeda is an author specializing in engineering, membrane filtration, and point-of-use filtration.
Publications per year
2009–2009
Defect reduction by using point-of-use filtration in a new coater/developer
Toru Umeda, Shuichi Tsuzuki, Toru Numaguchi · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 14 citations
Engineering, Materials Engineering, Materials Science +16
1–1 of 1