Statistics
Publications
1
Citations
28
H-Index
1
Active since
2006
Affiliations
Deh-Ming Shyu is an author at Industrial Technology Research Institute specializing in surface relief, form measurement, and surface profile.
Publications per year
2006–2006
1
1
Scatterometry-based metrology with feature region signatures matching
Yi‐Sha Ku, Shih-Chun Wang, Deh-Ming Shyu et al. · Optics Express · 2006 · 28 citations · Full text
Engineering, Materials Science, Materials Characterization +15
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