Concepedia

P. J. van der Put

PJ

13

Publications

269

Citations

11

H-Index

1977

Active since

Affiliations

Delft University of Technology(Current)

Energy Research Centre of the Netherlands

P. J. van der Put is an author at Delft University of Technology specializing in engineering, materials science, and chemistry.

Top concepts

Publications per year

1977–2001

13

Publications

13

Plasma enhanced chemical vapor deposition and characterization of boron nitride gate insulators on InP

A. Bath, P. J. van der Put, J. Schoonman et al. · Journal of Applied Physics · 1991 · 64 citations

, , +14

A Kinetic Study of Titanium Nitride Chemical Vapor Deposition Using Nitrogen, Hydrogen, and Titanium Tetrachloride

J.P. Dekker, P. J. van der Put, H.J. Veringa et al. · Journal of The Electrochemical Society · 1994 · 42 citations

, , +21

Laser‐Chemical Vapor Precipitation of Submierometer Silicon and Silicon Nitride Powders from Chlorinated Silanes

Robert Bauer, Robert Smulders, P. J. van der Put et al. · Journal of the American Ceramic Society · 1989 · 26 citations

, , +13

Study of boron nitride gate insulators grown by low temperature plasma enhanced chemical vapor deposition on InP

A. Bath, P. J. van der Put, J. Schoonman et al. · Applied Surface Science · 1989 · 22 citations

, , +5

Plasma enhanced chemical vapour deposition of boron nitride onto InP

A. Bath, O. Baehr, Mohammed Barrada et al. · Thin Solid Films · 1994 · 21 citations

, , +6

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