Concepedia

Z. Stavreva

ZS

Statistics

Publications

6

Citations

266

H-Index

6

Active since

1995

Affiliations

Technische Universität Dresden(Current)

Z. Stavreva is an author at Technische Universität Dresden specializing in corrosion, engineering, and surface polishing.

Top concepts

CorrosionEngineeringMaterial ScienceSurface PolishingMechanical EngineeringMicrostructureMaterial ProcessingMaterials EngineeringSurface ScienceChemical Engineering

Publications per year

1995–1997

6

Publications

6

Characterization of Cu chemical mechanical polishing by electrochemical investigations

D. Zeidler, Z. Stavreva, Matthias Plötner et al. · Microelectronic Engineering · 1997 · 78 citations

Materials Science, Electrometallurgy, Chemical Engineering +6

Characteristics in chemical-mechanical polishing of copper: comparison of polishing pads

Z. Stavreva, D. Zeidler, Matthias Plötner et al. · Applied Surface Science · 1997 · 49 citations

Materials Science, Materials Engineering, Chemical-mechanical Polishing +10

Chemical mechanical polishing of copper for multilevel metallization

Z. Stavreva, D. Zeidler, Matthias Plötner et al. · Applied Surface Science · 1995 · 48 citations

Materials Science, Materials Engineering, Engineering +8

Chemical-mechanical polishing of copper for interconnect formation

Z. Stavreva, D. Zeidler, Matthias Plötner et al. · Microelectronic Engineering · 1997 · 37 citations

Materials Science, Chemical-mechanical Polishing, Engineering +7

Influence of process parameters on chemical-mechanical polishing of copper

Z. Stavreva, D. Zeidler, Matthias Plötner et al. · Microelectronic Engineering · 1997 · 36 citations

Materials Science, Materials Engineering, Engineering +8

1–5 of 6