1b:I[76749,["/_next/static/chunks/bf18fea59be6d5b1.js","/_next/static/chunks/1ba21a8e081e29d1.js","/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/2060b26370dc6c0a.js","/_next/static/chunks/c89b4435b8c37fcf.js","/_next/static/chunks/8ddf2550f38c2f2a.js","/_next/static/chunks/5bf36002c846d2d8.js"],"default"] 1c:I[3486,["/_next/static/chunks/bf18fea59be6d5b1.js","/_next/static/chunks/1ba21a8e081e29d1.js","/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/2060b26370dc6c0a.js","/_next/static/chunks/c89b4435b8c37fcf.js","/_next/static/chunks/8ddf2550f38c2f2a.js","/_next/static/chunks/5bf36002c846d2d8.js"],"default"] 1d:I[17707,["/_next/static/chunks/bf18fea59be6d5b1.js","/_next/static/chunks/1ba21a8e081e29d1.js","/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/2060b26370dc6c0a.js","/_next/static/chunks/c89b4435b8c37fcf.js","/_next/static/chunks/8ddf2550f38c2f2a.js","/_next/static/chunks/5bf36002c846d2d8.js"],"default"] 1e:I[66528,["/_next/static/chunks/bf18fea59be6d5b1.js","/_next/static/chunks/1ba21a8e081e29d1.js","/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/2060b26370dc6c0a.js","/_next/static/chunks/c89b4435b8c37fcf.js","/_next/static/chunks/8ddf2550f38c2f2a.js","/_next/static/chunks/5bf36002c846d2d8.js"],"default"] 1f:I[63176,["/_next/static/chunks/bf18fea59be6d5b1.js","/_next/static/chunks/1ba21a8e081e29d1.js","/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/2060b26370dc6c0a.js","/_next/static/chunks/c89b4435b8c37fcf.js","/_next/static/chunks/8ddf2550f38c2f2a.js","/_next/static/chunks/5bf36002c846d2d8.js"],"default"] 20:I[87099,["/_next/static/chunks/bf18fea59be6d5b1.js","/_next/static/chunks/1ba21a8e081e29d1.js","/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/2060b26370dc6c0a.js","/_next/static/chunks/c89b4435b8c37fcf.js","/_next/static/chunks/8ddf2550f38c2f2a.js","/_next/static/chunks/5bf36002c846d2d8.js"],"default"] 21:I[26200,["/_next/static/chunks/bf18fea59be6d5b1.js","/_next/static/chunks/1ba21a8e081e29d1.js","/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/2060b26370dc6c0a.js","/_next/static/chunks/c89b4435b8c37fcf.js","/_next/static/chunks/8ddf2550f38c2f2a.js","/_next/static/chunks/5bf36002c846d2d8.js"],"Group"] 22:I[23365,["/_next/static/chunks/bf18fea59be6d5b1.js","/_next/static/chunks/1ba21a8e081e29d1.js","/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/2060b26370dc6c0a.js","/_next/static/chunks/c89b4435b8c37fcf.js","/_next/static/chunks/8ddf2550f38c2f2a.js","/_next/static/chunks/5bf36002c846d2d8.js"],"default"] 23:T4b8,Plasma modification of transition metal nitride/oxynitride (MO_xN_y) surfaces for enhanced surface properties is highly desirable, given the scalability of such methods and limitations of thermal treatments. In situ x-ray excited photoelectron spectroscopy demonstrates that the O₂ plasma oxidation of VO_xN_y films generates non-lattice N1s surface features with binding energies near 396.5 eV, which are associated with the nitrogen reduction reaction activity but not observed upon thermal oxidation. The NH₃ plasma generates N1s surface features near 400.5 eV binding energy. The O₂+NH₃ plasma generates both types of N1s features. Annealing in UHV to <1000 K reverses plasma-induced changes to N1s spectra. Density functional theory (DFT) calculations integrated with the experiments indicate that the plasma-induced N1s features at ∼396.5 eV and 400.5 eV are V≡N: and V-NH₂ sites, respectively, with significantly lower thermal stabilities than lattice N sites. These results provide practical insight regarding the plasma modification of MO_xN_y surfaces for important applications.

V. Lee

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