Concepedia

D. Angermeier

DA

Statistics

Publications

3

Citations

55

H-Index

3

Active since

1997

Affiliations

Centre National de la Recherche Scientifique(Current)

D. Angermeier is an author at Centre National de la Recherche Scientifique specializing in applied physics, materials science, and engineering.

Top concepts

Publications per year

1997–1998

3

Publications

3

Modeling and Analysis of the Silicon Epitaxial Growth with SiHCl3 in a Horizontal Rapid Thermal Chemical Vapor Deposition Reactor

D. Angermeier, R. Monna, A. Slaoui et al. · Journal of The Electrochemical Society · 1997 · 33 citations

, , +12

Analysis of thin film polysilicon on graphite substrates deposited in a thermal CVD system

D. Angermeier, R. Monna, A. Slaoui et al. · Journal of Crystal Growth · 1998 · 12 citations

, , +7

Initial Growth Processes in the Epitaxy of Ge with GeH4 on Oxidized Si Substrates

D. Angermeier, W. Kühn, R. Druihle et al. · Journal of The Electrochemical Society · 1997 · 10 citations

, , +12

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