Statistics
Publications
2
Citations
28
H-Index
2
Active since
2020
Affiliations
KLA (Israel)(Current)
Efi Megged is an author at KLA (Israel) specializing in optical metrology, device characterization, and electrical engineering.
Publications per year
2020–2022
2
2
On product overlay metrology challenges in advanced nodes
Andrei V. Shchegrov, Philippe Leray, Yuri Paskover et al. · 2020 · 18 citations
Engineering, Computer Engineering, Electrical Engineering +17
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