Concepedia

Yehwan Kim

YK

Statistics

Publications

2

Citations

29

H-Index

2

Active since

2016

Affiliations

Samsung (South Korea)(Current)

Hanyang University

Yehwan Kim is an author at Samsung (South Korea) specializing in metal removal rate, engineering, and mixing ratio dependence.

Publications per year

2016–2022

2

Publications

2

Communication—Synergistic Effect of Mixed Particle Size on W CMP Process: Optimization Using Experimental Design

Jihoon Seo, Jinok Moon, Yehwan Kim et al. · ECS Journal of Solid State Science and Technology · 2016 · 19 citations

, , +12

Fe-substituted silica via lattice dissolution–reprecipitation replacement for tungsten chemical mechanical planarization

Seho Sun, Kangchun Lee, Ganggyu Lee et al. · Journal of Industrial and Engineering Chemistry · 2022 · 10 citations

, , +11

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