Concepedia
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Publications
1
Citations
29
H-Index
Active since
1999
Harumichi Hirose is an author specializing in silicon materials, materials science, and materials processing.
Publications per year
1999–1999
Cleaning by Brush-Scrubbing of Chemical Mechanical Polished Silicon Surfaces Using Ozonized Water and Diluted HF
Yoshiaki Kurokawa, Harumichi Hirose, T. Moriya et al. · Japanese Journal of Applied Physics · 1999 · 29 citations
Engineering, Materials Engineering, Materials Science +17
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