Concepedia

Deepa Shukla

DS

5

Publications

118

Citations

5

H-Index

2019

Active since

Affiliations

University of Connecticut(Current)

Stanford University

Deepa Shukla is an author at University of Connecticut specializing in engineering, applied physics, and chemistry.

Top concepts

Publications per year

2019–2021

5

Publications

5

Low-Temperature As-Grown Crystalline β-Ga<sub>2</sub>O<sub>3</sub> Films via Plasma-Enhanced Atomic Layer Deposition

Saidjafarzoda Ilhom, Adnan Mohammad, Deepa Shukla et al. · ACS Applied Materials & Interfaces · 2021 · 34 citations

Atomic layer deposition of metal oxides for efficient perovskite single-junction and perovskite/silicon tandem solar cells

Mohammad Ismail Hossain, Adnan Mohammad, Wayesh Qarony et al. · RSC Advances · 2020 · 27 citations · Full text

Real-time <i>in situ</i> ellipsometric monitoring of aluminum nitride film growth via hollow-cathode plasma-assisted atomic layer deposition

Adnan Mohammad, Deepa Shukla, Saidjafarzoda Ilhom et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 21 citations

, , +13

Elucidating the role of nitrogen plasma composition in the low-temperature self-limiting growth of indium nitride thin films

Saidjafarzoda Ilhom, Adnan Mohammad, Deepa Shukla et al. · RSC Advances · 2020 · 20 citations · Full text

Understanding the role of rf-power on AlN film properties in hollow-cathode plasma-assisted atomic layer deposition

Saidjafarzoda Ilhom, Deepa Shukla, Adnan Mohammad et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 16 citations

, , +14

Rows per page

1–5 of 5