Concepedia

Jeffrey McAllister

JM

4

Publications

62

Citations

4

H-Index

2018

Active since

Affiliations

Sandia National Laboratories(Current)

University of Arizona

Arthritis and Rheumatism Associates

Jeffrey McAllister is an author at Sandia National Laboratories specializing in mechanics of materials, microfabrication, and solid mechanics.

Top concepts

MechanicsEngineeringSoft MatterMicrostructureSolid MechanicsMaterial ScienceMicrofabricationMaterial ProcessingMechanical EngineeringMechanics Of Materials

Publications per year

2018–2020

4

Publications

4

Effect of Conditioning Downforce and Pad Break-In Time on Pad Surface Micro-Texture

Jeffrey McAllister, Calliandra Stuffle, Yasa Sampurno et al. · ECS Journal of Solid State Science and Technology · 2018 · 21 citations · Full text

Effect of Conditioner Type and Downforce, and Pad Break-In Time, on Pad Surface Micro-Texture in Chemical Mechanical Planarization

Jeffrey McAllister, Calliandra Stuffle, Yasa Sampurno et al. · ECS Journal of Solid State Science and Technology · 2018 · 19 citations

Engineering, Mechanical Engineering, Pad Surface Micro-texture +17

Tribological, Thermal and Kinetic Characterization of SiO <sub>2</sub> and Si <sub>3</sub> N <sub>4</sub> Polishing for STI CMP on Blanket and Patterned Wafers

Juan Cristobal Mariscal, Jeffrey McAllister, Yasa Sampurno et al. · ECS Journal of Solid State Science and Technology · 2020 · 12 citations

Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization Performance

Jeffrey McAllister, Calliandra Stuffle, Yasa Sampurno et al. · Micromachines · 2019 · 10 citations · Full text

Rows per page

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