Michael G. Simmonds

Detection of aluminum particles during the chemical vapor deposition of aluminum films using tertiaryamine complexes of alane (AlH3)

Michael G. Simmonds, Wayne L. Gladfelter, Nagaraja Rao et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 33 citations

Materials Science, Aluminium Nitride, Chemical Engineering +14

Selective Area Chemical Vapor Deposition of Aluminum Using Dimethylethylamine Alane

Michael G. Simmonds, Isabelle Taupin, Wayne L. Gladfelter · Chemistry of Materials · 1994 · 32 citations

Materials Science, Aluminium Nitride, Chemical Engineering +12

Particle contamination in low pressure organometallic chemical vapor deposition reactors: Methods of particle detection and causes of particle formation using a liquid alane (AlH3) precursor

Michael G. Simmonds, Wayne L. Gladfelter, Haojiang Li et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 13 citations

Materials Science, Chemical Engineering, Engineering +13

Chemical vapor deposition of Al from dimethylethylamine alane on GaAs(100)<i>c</i>(4×4) surfaces

Gvido Bratina, Lucia Sorba, A. Franciosi et al. · Journal of Applied Physics · 1994 · 13 citations

Materials Science, Semiconductors, Engineering +14