R. Benferhat

Space-charge-limited conduction for the determination of the midgap density of states in amorphous silicon: Theory and experiment

I. Solomon, R. Benferhat, H. Tran Quoc · Physical review. B, Condensed matter · 1984 · 116 citations

Electrical Engineering, Space-charge-limited Conduction, Engineering +15

Infrared ellipsometry study of the vibrational properties and the growth of hydrogenated amorphous silicon ultrathin films

B. Drévillon, R. Benferhat · Journal of Applied Physics · 1988 · 31 citations

Materials Science, Engineering, Electronic Materials +15

IR ellipsometry study of oriented molecular monolayers

R. Benferhat, B. Drévillon, Philippe Robin · Thin Solid Films · 1988 · 28 citations

Surface Characterization, Engineering, Surface Chemistry +3

Design Of A New In Situ Spectroscopic Phase Modulated Ellipsometer

B. Drévillon, J.Y. Parey, M. Stchakovsky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 27 citations

Engineering, Optical Testing, Other Ellipsometric Techniques +18

‘Real-time’ multiwavelength ellipsometry diagnostics for monitoring dry etching of Si and TiN deposition

V. Kechagias, M. Gioti, S. Logothetidis et al. · Thin Solid Films · 2000 · 12 citations

Materials Science, Surface Characterization, Engineering +12