Concepedia

M. Damayanti

MD

6

Publications

237

Citations

6

H-Index

2004

Active since

Affiliations

Nanyang Technological University(Current)

M. Damayanti is an author at Nanyang Technological University specializing in materials engineering, engineering, and materials science.

Top concepts

EngineeringMaterials EngineeringMaterial ScienceApplied PhysicsSurface ScienceThin FilmsPhysicsMicrostructureMechanical EngineeringHydrogen

Publications per year

2004–2007

6

Publications

6

Effects of dissolved nitrogen in improving barrier properties of ruthenium

M. Damayanti, Thirumany Sritharan, Subodh G. Mhaisalkar et al. · Applied Physics Letters · 2006 · 74 citations

Engineering, Dissolved Nitrogen, Diffusion Barrier Properties +20

Ruthenium Barrier/Seed Layer for Cu/Low-κ Metallization

M. Damayanti, Thirumany Sritharan, Zhihua Gan et al. · Journal of The Electrochemical Society · 2006 · 64 citations

Materials Science, Materials Engineering, Ruthenium Barrier/seed Layer +14

Adhesion study of low-k/Si system using 4-point bending and nanoscratch test

M. Damayanti, J. Widodo, Thirumany Sritharan et al. · Materials Science and Engineering B · 2005 · 41 citations

Materials Science, Materials Engineering, Engineering +9

Study of Ru barrier failure in the Cu/Ru/Si system

M. Damayanti, Thirumany Sritharan, Subodh G. Mhaisalkar et al. · Journal of materials research/Pratt's guide to venture capital sources · 2007 · 27 citations

Materials Engineering, Engineering, Applied Physics +4

Microstructural Evolution of Annealed Ruthenium–Nitrogen Films

M. Damayanti, Thirumany Sritharan, Subodh G. Mhaisalkar et al. · Electrochemical and Solid-State Letters · 2007 · 20 citations

Engineering, Annealed Ruthenium–nitrogen Films, Chemical Deposition +16

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