Concepedia

Seung‐Mahn Lee

SL

Statistics

Publications

2

Citations

112

H-Index

2

Active since

2002

Affiliations

University of Florida(Current)

Seung‐Mahn Lee is an author at University of Florida specializing in mechanical engineering, engineering, and materials science.

Top concepts

EngineeringMaterial ScienceMechanical EngineeringDielectricsMicrostructureSurface ScienceMicroelectronicsMicrofabricationSurface PolishingMaterial Processing

Publications per year

2002–2004

2

Publications

2

Fundamentals of Slurry Design for CMP of Metal and Dielectric Materials

Rajiv K. Singh, Seung‐Mahn Lee, Kyu-Se Choi et al. · MRS Bulletin · 2002 · 85 citations

Materials Science, Materials Engineering, Engineering +10

pH and Down Load Effects on Silicon Dioxide Dielectric CMP

Wonseop Choi, Seung‐Mahn Lee, Rajiv K. Singh · Electrochemical and Solid-State Letters · 2004 · 27 citations

Engineering, Mechanical Engineering, Silicon On Insulator +17

Rows per page

1–2 of 2