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Atsutoshi Inokuchi

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Publications

2

Citations

35

H-Index

2

Active since

2008

Affiliations

Tohoku University(Current)

Atsutoshi Inokuchi is an author at Tohoku University specializing in applied physics, engineering, and thin films.

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Publications per year

2008–2009

2

Publications

2

Low-Dielectric-Constant Nonporous Fluorocarbon Films for Interlayer Dielectric

Azumi Itoh, Atsutoshi Inokuchi, Seiji Yasuda et al. · Japanese Journal of Applied Physics · 2008 · 18 citations

, , +14

Characterization of MgZnO films grown by plasma enhanced metal-organic chemical vapor deposition

Hirokazu Asahara, Daiju Takamizu, Atsutoshi Inokuchi et al. · Thin Solid Films · 2009 · 17 citations

, , +8

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