Yohko Iwabuchi

YI

Statistics

Publications

1

Citations

13

H-Index

1

Active since

1993

Affiliations

NEC (Japan)(Current)

Yohko Iwabuchi is an author at NEC (Japan) specializing in phase-shift lithography, microfabrication, and phase shift masks.

Publications per year

1993–1993

1

Publications

1