Statistics
Publications
5
Citations
88
H-Index
5
Active since
2009
Affiliations
Y.H. Li is an author at Xi'an Jiaotong University specializing in applied physics, engineering, and thin films.
Publications per year
2009–2020
5
5
Ultrathin ZrBxOy films as diffusion barriers in Cu interconnects
Zhongxiao Song, J.H. Chen, Fei Ma et al. · Vacuum · 2015 · 17 citations
The self-formation graded diffusion barrier of Zr/ZrN
Zhongxiao Song, J.A. Wang, Y.H. Li et al. · Microelectronic Engineering · 2009 · 10 citations
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